99.9% Purity C4f6 CAS 685-63-2 Hexafluorobutadiene Gas

Product Description

Industry-specific attributes

Etching Gases UN 3160 Electronic Grade Octafluorocyclobutane C4F6 Gas

Hexafluoro1,3‐butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas

Years of research have shown that C4F6 (H-2316) presents several advantages for dry etching of oxide-based materials:

 It has a higher etch rate and selectivity than octafluorocyclobutane ,another extensively used etchant for silicon oxide. Unlike(H318), with C4F6 (H2316), only the dielectric substrate is etched. The etched structure has a higher aspect ratio, leading to narrower trenches compared .VOC emissions are reduced: C4F6 (H2316) has low global warming potential because it has a much shorter lifetime in the atmosphere.
 

Product Name :	HEXAFLUOROCYCLOBUTENE	Purity:	99.9~99.99%
CAS No.:	697-11-0	EINECS No.:	211-803-2
MF:	C4F6	Molar mass:	697-11-0.mol
UN No.:	3162	Hazard Class :	2.3+2.1
Appearance:	Colorless, non-combustible	Odor:	odorless

 

Inspection item	unit	Requirement
C4F6	%	99.9
Ar+O2	ppmv	≤10
N2	ppmv	≤40
CO2	ppmv	≤20
CO	ppmv	≤7
THC	ppmv	≤700
HF	ppmv	≤10

Packing and Delivery

DOT transportation:	Liquefied gas, toxic, Nonflammable
DOT classification:	2.2
UN NO.:	UN 3160
CAS NO.:	3162
CGA/DISS Valve:	580

CAS No.
692-50-2
Purity
99.999%

Other attributes

Place of Origin
Taiwan, China
Other Names
HFB
MF
C4F6
EINECS No.
211-803-2
Grade Standard
Industrial Grade, Electron Grade
Appearance
colorless gas
Application
semiconductor
Brand Name
OEM
Model Number
C4F6
Product name
C4F6 gas
Hazard Class
2.3, 2.1
Color
Colorless
Certificate
ISO9001
MOQ
2 Cylinders
Hazard Note
Toxic
UN No
3162
Odor
Odorless
Package
Seamless Steel Cylinder
Cylinder Type
ISO/GB/DOT

Packaging and delivery

Packaging Details
DOT 43/48.8 L/GB 980L/500L

Port
Shanghai,Qingdao,NingBo ,HongKong ,KaoHsiung

Supply Ability

Supply Ability
10000 Piece/Pieces per Year
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Lead time

Quantity (kilograms)	1 - 5	6 - 20	21 - 50	> 50
Lead time (days)	3	7	15	To be negotiated

Etching Gases UN 3160 Electronic Grade Octafluorocyclobutane C4F6 Gas

Hexafluoro1,3‐butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas

Years of research have shown that C4F6 (H-2316) presents several advantages for dry etching of oxide-based materials:

 It has a higher etch rate and selectivity than octafluorocyclobutane (c-C4F8 - H318), another extensively used etchant for silicon oxide. Unlike C4F8 (H318), with C4F6 (H2316), only the dielectric substrate is etched. The etched structure has a higher aspect ratio, leading to narrower trenches compared to c-C4F8.VOC emissions are reduced: C4F6 (H2316) has low global warming potential because it has a much shorter lifetime in the atmosphere.