99.9% Purity C4f6 CAS 685-63-2 Hexafluorobutadiene Gas
Product Details
| Customization: | Available |
|---|---|
| CAS No.: | 685-63-2 |
| Formula: | C4f6 |
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Basic Info.
- Model NO.
- Hexafluorobutadiene
- EINECS
- 211-681-0
- Classification
- Alkynes
- Grade Standard
- Industrial Grade
- Whether Ring Formation or Not
- Cyclic Hydrocarbon
- Whether Containing Benzene Ring
- Alicyclic Hydrocarbon
- Fat Hydrocarbon Saturation
- Alkane
- Constituent
- Industrial Pure Air
- Chemical Property
- Non-Flammable Gas
- Transport Package
- Carton
- Origin
- China
Product Description
Industry-specific attributes
Etching Gases UN 3160 Electronic Grade Octafluorocyclobutane C4F6 GasHexafluoro1,3‐butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas
Years of research have shown that C4F6 (H-2316) presents several advantages for dry etching of oxide-based materials:
It has a higher etch rate and selectivity than octafluorocyclobutane ,another extensively used etchant for silicon oxide. Unlike(H318), with C4F6 (H2316), only the dielectric substrate is etched. The etched structure has a higher aspect ratio, leading to narrower trenches compared .VOC emissions are reduced: C4F6 (H2316) has low global warming potential because it has a much shorter lifetime in the atmosphere.
| Product Name : | HEXAFLUOROCYCLOBUTENE | Purity: | 99.9~99.99% |
| CAS No.: | 697-11-0 | EINECS No.: | 211-803-2 |
| MF: | C4F6 | Molar mass: | 697-11-0.mol |
| UN No.: | 3162 | Hazard Class : | 2.3+2.1 |
| Appearance: | Colorless, non-combustible | Odor: | odorless |
| Inspection item | unit | Requirement |
| C4F6 | % | 99.9 |
| Ar+O2 | ppmv | ≤10 |
| N2 | ppmv | ≤40 |
| CO2 | ppmv | ≤20 |
| CO | ppmv | ≤7 |
| THC | ppmv | ≤700 |
| HF | ppmv | ≤10 |
Packing and Delivery
| DOT transportation: | Liquefied gas, toxic, Nonflammable |
| DOT classification: | 2.2 |
| UN NO.: | UN 3160 |
| CAS NO.: | 3162 |
| CGA/DISS Valve: | 580 |
CAS No.
692-50-2
Purity
99.999%
Other attributes
Place of OriginTaiwan, China
Other Names
HFB
MF
C4F6
EINECS No.
211-803-2
Grade Standard
Industrial Grade, Electron Grade
Appearance
colorless gas
Application
semiconductor
Brand Name
OEM
Model Number
C4F6
Product name
C4F6 gas
Hazard Class
2.3, 2.1
Color
Colorless
Certificate
ISO9001
MOQ
2 Cylinders
Hazard Note
Toxic
UN No
3162
Odor
Odorless
Package
Seamless Steel Cylinder
Cylinder Type
ISO/GB/DOT
Packaging and delivery
Packaging DetailsDOT 43/48.8 L/GB 980L/500L
Port
Shanghai,Qingdao,NingBo ,HongKong ,KaoHsiung
Supply Ability
Supply Ability10000 Piece/Pieces per Year
Show less
Lead time
| Quantity (kilograms) | 1 - 5 | 6 - 20 | 21 - 50 | > 50 |
| Lead time (days) | 3 | 7 | 15 | To be negotiated |
Etching Gases UN 3160 Electronic Grade Octafluorocyclobutane C4F6 Gas
Hexafluoro1,3‐butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas
Years of research have shown that C4F6 (H-2316) presents several advantages for dry etching of oxide-based materials:
It has a higher etch rate and selectivity than octafluorocyclobutane (c-C4F8 - H318), another extensively used etchant for silicon oxide. Unlike C4F8 (H318), with C4F6 (H2316), only the dielectric substrate is etched. The etched structure has a higher aspect ratio, leading to narrower trenches compared to c-C4F8.VOC emissions are reduced: C4F6 (H2316) has low global warming potential because it has a much shorter lifetime in the atmosphere.
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